Title :
High performance micromachined transducer based on electrostrictive P(VDF-TrFE) polymer
Author :
Xu, Tian-Bing ; Zhang, W.M.
Author_Institution :
Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA
Abstract :
High performances of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidede fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer is developed. The PMAT exhibits a very high stroke level with high load capability, broad frequency range (>100 kHz), and high displacement sensitivity. In addition, the simulated results, based on the properties of the materials and the structure of the device, are consistent with the experimental observation
Keywords :
electrostriction; microactuators; polymer blends; 100 kHz; MEMS; P(VDF-TrFE) copolymer; electrostrictive copolymer; high displacement sensitivity; high load capability; high performance micromachined transducer; high stroke level; microactuator; micromachined unimorph actuators; poly(vinylidede fluoride-trifluoroethylene); polymer micromachined actuator; Actuators; Capacitive sensors; Electrodes; Electrostriction; Frequency; Microactuators; Micromechanical devices; Polymer films; Transducers; Uniaxial strain;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991869
