Capacitive micromachined ultrasonic transducers with asymmetric membranes for microfluidic applications

Author

McLean, Jeff ; Degertekin, F. Levent

Author_Institution

Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

2

fYear

2001

fDate

2001

Firstpage

925

Abstract

A 2D finite element model for capacitive micromachined ultrasonic transducer (cMUT) arrays is developed. The model is verified by comparing the results to experimental data obtained on 1D cMUT arrays. The model accurately predicts the phenomenon involved in crosstalk in cMUT arrays, namely Lamb and Stoneley waves. Using normal mode theory in conjunction with finite element analysis, the acoustic power coupled to the Stoneley waves is found to be significant and its use for fluidic sensing and actuation is proposed. The effect of cMUT geometry on the efficiency and mode selectivity of Stoneley wave generation is also studied and the results are presented

Keywords

capacitive sensors; crosstalk; finite element analysis; membranes; microactuators; microfluidics; microsensors; modelling; surface acoustic waves; ultrasonic transducer arrays; 2D finite element model; Lamb waves; Stoneley wave generation; US transducer arrays; acoustic power; asymmetric membranes; capacitive micromachined US transducers; crosstalk; efficiency; finite element analysis; fluidic actuation; fluidic sensing; microfluidic applications; micromachined ultrasonic transducers; mode selectivity; normal mode theory; transducer geometry; Acoustic waves; Biomembranes; Finite element methods; Geometry; Mechanical engineering; Microfluidics; Predictive models; Reflection; Ultrasonic transducer arrays; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991871

Filename

991871