Title :
Micromachined ultrasonic silicon/PZT transducer for underwater communications
Author :
Siwapornsathain, Ekapon ; Lal, Amit
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
Abstract :
This paper presents design and experimental results on a miniature micromachined silicon sensor platform that includes an ultrasonic transmitter powered by miniature batteries. The transmitter consists of a Pierce oscillator formed with a silicon/PZT laminate transducer as the mechanical oscillator. FSK (frequency-shift-keying) transmission of digital data is accomplished by inductive switching in the Pierce oscillator. The device architecture allows for further miniaturization of underwater sensor systems
Keywords :
digital communication; frequency shift keying; laminates; lead compounds; microactuators; microsensors; silicon; transmitters; ultrasonic transducers; underwater acoustic communication; FSK transmission; IC integratable feedback amplifier circuit; Pierce oscillator; Si-PZT; Si-PbZrO3TiO3; Si/PZT laminate transducer; digital data; electronic drive; frequency-shift-keying; inductive switching; mechanical oscillator; micromachined Si sensor platform; micromachined US Si/PZT transducer; miniature batteries; ultrasonic Si/PZT transducer; ultrasonic communications; ultrasonic transmitter; underwater communications; underwater sensor systems; Actuators; Batteries; Frequency; Laminates; Oscillators; Probes; Silicon; Transmitters; Ultrasonic transducers; Underwater communication;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991875
