• DocumentCode
    2365716
  • Title

    Integration of individual nanoscale structures into devices using dynamic nanostenciling

  • Author

    Egger, Stefan ; Ilie, Adelina ; Machida, Shinichi ; Nakayama, Tomonobu

  • Author_Institution
    International Center for Young Scientists, NIMS, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
  • fYear
    2008
  • fDate
    24-27 March 2008
  • Firstpage
    158
  • Lastpage
    159
  • Abstract
    We succeeded in integrating individual, pre-existing nanostructures into functional devices using ultrahigh vacuum dynamic nanostenciling. Nanostructures are first located via atomic force microscopy (AFM), while device elements are added step by step, with an achieved positional accuracy of 20 nm. Electronic transport, potentiometry, and scanning Kelvin probe can be used for control at any fabrication stage.
  • Keywords
    Nanoelectronics; Nanoscale devices; Nanostructures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
  • Conference_Location
    Shanghai, China
  • Print_ISBN
    978-1-4244-1572-4
  • Electronic_ISBN
    978-1-4244-1573-1
  • Type

    conf

  • DOI
    10.1109/INEC.2008.4585459
  • Filename
    4585459