DocumentCode
2365716
Title
Integration of individual nanoscale structures into devices using dynamic nanostenciling
Author
Egger, Stefan ; Ilie, Adelina ; Machida, Shinichi ; Nakayama, Tomonobu
Author_Institution
International Center for Young Scientists, NIMS, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
fYear
2008
fDate
24-27 March 2008
Firstpage
158
Lastpage
159
Abstract
We succeeded in integrating individual, pre-existing nanostructures into functional devices using ultrahigh vacuum dynamic nanostenciling. Nanostructures are first located via atomic force microscopy (AFM), while device elements are added step by step, with an achieved positional accuracy of 20 nm. Electronic transport, potentiometry, and scanning Kelvin probe can be used for control at any fabrication stage.
Keywords
Nanoelectronics; Nanoscale devices; Nanostructures;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location
Shanghai, China
Print_ISBN
978-1-4244-1572-4
Electronic_ISBN
978-1-4244-1573-1
Type
conf
DOI
10.1109/INEC.2008.4585459
Filename
4585459
Link To Document