Title :
Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers
Author :
Karlsson, M. ; Nikolajeff, F. ; Martinsson, H. ; Larsson, A.
Author_Institution :
Angstrom Lab., Uppsala Univ., Sweden
Abstract :
In this work, we have studied the transfer of diffractive optical elements, originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting laser.
Keywords :
III-V semiconductors; diffractive optical elements; gallium arsenide; integrated optoelectronics; optical fabrication; resists; semiconductor lasers; surface emitting lasers; GaAs; continuous-relief diffractive structures; diffractive optical elements; monolithic integration; resist; vertical-cavity surface-emitting lasers; Gallium arsenide; Integrated optics; Monolithic integrated circuits; Optical diffraction; Optical interconnections; Optical refraction; Optical variables control; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Semiconductor Laser Conference, 2002. IEEE 18th International
Print_ISBN :
0-7803-7598-X
DOI :
10.1109/ISLC.2002.1041123
