Title : 
Development of QHR arrays in NIM
         
        
            Author : 
Zhong Qing ; Wang Xueshen ; Li Jinjin ; Li Zhun ; Kang Lei
         
        
            Author_Institution : 
Nat. Inst. of Metrol., Beijing, China
         
        
        
        
        
        
            Abstract : 
We report the fabrication and measurement of quantum Hall (QH) array devices based on GaAs/AlGaAs heterostructure in NIM. Three QH arrays, namely 2 Hall bars in series, 2 Hall bars in parallel, and 4 Hall bars in series are demonstrated. The low resolution preliminary measurement results are presented. The present resolution is limited by the measurement equipment and environment.
         
        
            Keywords : 
Hall effect devices; III-V semiconductors; aluminium compounds; electric resistance measurement; gallium arsenide; measurement standards; quantum Hall effect; two-dimensional electron gas; GaAs-AlGaAs; Hall bars; quantum Hall array devices; quantum Hall array resistance standards; quantum Hall effect; Bars; Electrical resistance measurement; Fabrication; Gallium arsenide; Insulation; Resistance; Wires; Quantum Hall effect (QHE); quantum Hall array resistance devices (QHAR); quantum Hall array resistance standards (QHARS);
         
        
        
        
            Conference_Titel : 
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
         
        
            Conference_Location : 
Rio de Janeiro
         
        
        
            Print_ISBN : 
978-1-4799-5205-2
         
        
        
            DOI : 
10.1109/CPEM.2014.6898573