Title :
Resonant frequency tuning of two dimensional PZT array using laser trimming
Author :
Ochoco, Jomar ; Sigurdsson, O.J. ; Lal, Amit
Author_Institution :
SonicMEMS Lab., Wisconsin Univ., Madison, WI, USA
Abstract :
Two-dimensional PZT (lead-zirconate-titanate oxide) arrays can be used in microfluidics applications, but require identical resonance frequencies across the entire array for a phase control scheme. To tune the resonance frequencies, one can remove material from a pixel. Removing the nickel electrode increases the resonance frequency while removing PZT causes a reduction in the resonance frequency. The laser pulses excite the second harmonic, which can be used to tune the resonance frequency in-situ of a packaged microfluidics device
Keywords :
laser beam machining; lead compounds; microfluidics; piezoelectric transducers; ultrasonic transducer arrays; Ni; PZT; PbZrO3TiO3; laser trimming; nickel electrode; packaged microfluidics device; phase control; resonant frequency tuning; second harmonic excitation; two-dimensional PZT array; Laser tuning; Lead compounds; Microfluidics; Nickel; Optical arrays; Optical materials; Phase control; Phased arrays; Resonance; Resonant frequency;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991890
