Vibration velocity limitation of transducer using hydrothermal PZT film

High intensity vibration operation of a PZT thin film longitudinal vibrator fabricated with a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.54 m/s. This value was almost 3 times larger than that of bulk PZT material. At such high intensity vibration level of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear