DocumentCode
2366276
Title
Synthesis and characterization of dandelion-shaped SiCN rods
Author
Qian, Yanni ; Ma, Xueming ; Cheng, Wenjuan
Author_Institution
State Key Lab. of Precision Spectrosc., East China Normal Univ., Shanghai
fYear
2008
fDate
24-27 March 2008
Firstpage
289
Lastpage
292
Abstract
Assited by Co as catalyst, an interesting structure, dandelion-shaped SiCN rods, was synthesized using microwave plasma chemical vapor deposition method with gas mixtures of CH4, H2 and N2 as precursors and Si chips inserted in the sample holder at symmetrical positions around the specimen as additional Si sources. Scanning electron microscopy shows each rod has not only a column about 0.4~0.8 mum in diameter and about 10~20 mum in length, but also a ~2 mum sized ball-like tip, from which nanowiskers of 0.3 mum long with 20~30 nm in diameter were formed. The samples are atomic-level hybrids composed of Si, C and N atoms. Two strong peaks (3.25 and 2.84 eV) were observed from photoluminescence spectroscopy at room temperature, indicating the dandelion-shaped SiCN rods have potential application in optoelectronic devices.
Keywords
catalysts; cobalt; elemental semiconductors; nanostructured materials; nanotechnology; photoluminescence; plasma CVD; scanning electron microscopy; silicon; silicon compounds; whiskers (crystal); wide band gap semiconductors; Si; SiCN; catalyst; chips; dandelion-shaped rods; microwave plasma chemical vapor deposition method; nanowhiskers; optoelectronic devices; photoluminescence spectroscopy; scanning electron microscopy; temperature 293 K to 298 K; Chemical vapor deposition; Microwave theory and techniques; Optoelectronic devices; Photoluminescence; Plasma chemistry; Plasma sources; Plasma temperature; Scanning electron microscopy; Spectroscopy; Structural rods;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location
Shanghai
Print_ISBN
978-1-4244-1572-4
Electronic_ISBN
978-1-4244-1573-1
Type
conf
DOI
10.1109/INEC.2008.4585488
Filename
4585488
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