DocumentCode :
2366641
Title :
Charged device model (CDM) metrology: limitations and problems
Author :
Henry, Leo G. ; Hyatt, Hugh ; Barth, Jon ; Stevens, Michael ; Diep, Tom
Author_Institution :
Adv. Micro Devices Inc., Sunnyvale, CA, USA
fYear :
1996
fDate :
10-12 Sept. 1996
Firstpage :
167
Lastpage :
179
Abstract :
The inconsistent performance of various CDM test heads indicates severe metrology problems exist. Test head-to-test head response times vary by factors of two to three and no independent calibration method exists. CDM waveforms depend upon the total measurement system. This paper discusses the problems and methods necessary to the capture of believable CDM waveforms.
Keywords :
calibration; electrostatic discharge; testing; CDM test head; ESD; calibration; charged device model metrology; measurement system; waveform capture; Calibration; Electrostatic discharges; Electrostatic measurements; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 1996. Proceedings
Print_ISBN :
1-878303-69-4
Type :
conf
DOI :
10.1109/EOSESD.1996.865139
Filename :
865139
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2366641
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