Title :
Preparation and characterization of SiO2 nano-rods by CVD method
Author :
Guang Zhu ; Xiaoping Zou ; Jin Cheng ; Hongdan Zhang ; Fei Li ; Pengfei Ren ; Maofa Wang ; Yi Su
Author_Institution :
Res. Center for Sensor Technol., Beijing Inf. Technol. Inst., Beijing
Abstract :
A simple method is presented for the preparation of silica nano-rods. The silica nano-rods with a diameter of about 200 nm with smooth surface were synthesized by chemical vapor deposition method at 1300square. The as-synthesized samples were characterized by means of scanning electron microscopy, energy dispersive x-ray, and transmission electron microscopy. The results show that synthesized silica nano-rods have a uniform size, well-defined shape, and smooth surface. However, the morphologies and microstructures of silica nano-rods are affected by synthesis conditions, such as the synthesis temperature and the vapor concentration of the SiOx. On the basis of these experimental results, a possible growth mechanism of silica nano-rods in this process is proposed.
Keywords :
X-ray chemical analysis; chemical vapour deposition; nanotubes; scanning electron microscopy; silicon compounds; transmission electron microscopy; CVD method; SiO2; chemical vapor deposition; energy dispersive x-ray; nano-rods; scanning electron microscopy; transmission electron microscopy; Nanoelectronics; CVD; scanning and transmission electron microscopy; silica nano-rods; synthesis conditions;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585510