Title :
Synthesis of R-SiC nanowires via catalyst-free chemical vapour growth route
Author :
Mustapha, Wan Nur Fadzilah Wan ; Yew Cheong, Kuan ; Lockman, Zainovia
Author_Institution :
Electron. Mater. Res. Group, Univ. Sains Malaysia, Nibong Tebal
Abstract :
Rhombohedral-silicon carbide nanowires were synthesized using chemical vapour growth approach, which was conducted in a vacuum system. In the process of synthesizing SiC nanowires, activated carbon powder and Si wafer were used as source material. Heating temperature (1200-1350degC) and dwelling time (1-4 h) were systematically investigated. The morphology and chemical composition of the sample were evaluated using field-emission scanning-electron microscopy with energy dispersive X-ray spectroscopy, X-ray diffractometer spectroscopy, transmission electron microscopy, and Raman spectroscopy. The nanowires with diameter and length in the range of 10-30 nm and lengths up to several ten of micrometers, respectively, were obtained.
Keywords :
Raman spectra; X-ray diffraction; X-ray spectra; nanotechnology; nanowires; semiconductor growth; silicon compounds; transmission electron microscopy; wide band gap semiconductors; Raman spectroscopy; SiC; X-ray diffractometer spectroscopy; activated carbon powder; catalyst-free chemical vapour growth route; chemical composition; energy dispersive X-ray spectroscopy; field-emission scanning-electron microscopy; rhombohedral-silicon carbide nanowires synthesis; silicon wafer; temperature 1200 C to 1350 C; time 1 h to 4 h; transmission electron microscopy; vacuum system; Chemicals; Conducting materials; Nanowires; Powders; Raman scattering; Scanning electron microscopy; Silicon carbide; Spectroscopy; Transmission electron microscopy; Vacuum systems;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585523