DocumentCode :
2366889
Title :
New charged-plate monitor design offers greater flexibility
Author :
Zacher, David M.
Author_Institution :
Trek Inc., Medina, NY, USA
fYear :
1996
fDate :
10-12 Sept. 1996
Firstpage :
254
Lastpage :
258
Abstract :
Charged-plate monitors are used to measure the effectiveness of air ionization systems throughout an ESD-sensitive device manufacturing process. Difficulty arises when one wishes to know what is occurring in a small space within that process. The conventional charged-plate monitor plate assembly is very bulky and many types cannot be remotely located from the instrument. A new technique for a charged-plate monitor is described. Design theory is presented and compared to conventional charged-plate monitor designs and advantages of the new design are discussed. Simplicity of design and flexibility in design and function are highlighted for this user-oriented system.
Keywords :
electrostatic discharge; monitoring; production testing; ESD-sensitive device; air ionization systems; charged-plate monitor design; design theory; manufacturing process; user-oriented system; Electrostatic discharges; Manufacturing testing; Plates; Process monitoring;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 1996. Proceedings
Print_ISBN :
1-878303-69-4
Type :
conf
DOI :
10.1109/EOSESD.1996.865150
Filename :
865150
Link To Document :
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