• DocumentCode
    2367074
  • Title

    Mechanical stress dependence of power device electrical characteristics

  • Author

    Tanaka, Hiroaki ; Hotta, Koji ; Kuwano, Satoshi ; Usui, Masanori ; Ishiko, Masayasu

  • Author_Institution
    Toyota Motor Corp., Aichi
  • fYear
    2006
  • fDate
    4-8 June 2006
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper describes how mechanical stress affects the electrical characteristics of a power device, depending on the surface structure of the device or the device type. Experimental results show that devices in which the current flow direction is vertical to the substrate, such as trench structure devices, are affected the least by mechanical stress
  • Keywords
    power semiconductor devices; semiconductor device testing; stress effects; current flow direction; electrical characteristics; mechanical stress dependence; power device; surface structure; trench structure devices; Capacitive sensors; Deformable models; Electric variables; Multichip modules; Piezoresistance; Silicon; Temperature dependence; Tensile stress; Thermal resistance; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and IC's, 2006. ISPSD 2006. IEEE International Symposium on
  • Conference_Location
    Naples
  • Print_ISBN
    0-7803-9714-2
  • Type

    conf

  • DOI
    10.1109/ISPSD.2006.1666056
  • Filename
    1666056