Title :
Electrostatic problems in TFT-LCD production and solutions using ionization
Author :
Murakami, Toshio ; Togari, Haruyuki ; Steinman, Arnold
Author_Institution :
Harada Corp., Tokyo, Japan
Abstract :
The liquid crystal display (LCD) has a multilayered structure combining insulating materials and electronic circuit devices. Many LCD production methods are accompanied by friction, movement, and separation of materials. It is difficult to avoid static charge generation and the resulting electrostatic problems of particle attraction and electrostatic discharge (ESD). This paper describes the problems caused by static charge in LCD manufacturing, and control measures using ionization.
Keywords :
electronic equipment manufacture; electrostatic discharge; ionisation; liquid crystal displays; surface charging; thin film transistors; ESD; LCD manufacturing; TFT-LCD production; control measures; electronic circuit devices; electrostatic discharge; electrostatic problems; insulating materials; ionization; liquid crystal display; multilayered structure; particle attraction; static charge generation; Electronic equipment manufacture; Electrostatic discharges; Ionization; Liquid crystal displays; Surface charging; Thin film transistors;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 1996. Proceedings
Print_ISBN :
1-878303-69-4
DOI :
10.1109/EOSESD.1996.865165
