Comparative Study on Finite Element Analysis & System Model Extraction for Non-Resonant 3-DoF Microgyroscope

This paper reports a comparative study of full transient start up analysis of a Non-Resonant Micromachined Gyroscope using Finite Element Analysis (FEA) and System Model Extraction (SME) techniques. FEA is a popular numerical technique based on Finite Element Method (FEM) for carrying out different engineering analyses. But one of the major disadvantages of this FEA is its computational time. While running multiple optimization analyses with a FE Solver, it may take days, weeks and possibly months depending on extent of optimization. In this study we initially analyzed the MEMS based microgyro on a device level using FEM. We determined the natural frequencies of the gyro along with the both static and dynamic responses of the gyro. After these device level simulations in FEA we switched to the system level simulation. Using SME we generated system model of the gyro with system level components and run a full transient startup response analysis of the device by incorporating that extracted model in INTELLISUITE circuit simulator SYNPLE. When we compared the computational time required by both techniques, we found that SME with SYNPLE is orders of magnitude faster than FEA.