Title :
A phase-change via-reconfigurable on-chip inductor
Author :
Wen, C.-Y. ; Chua, E.K. ; Zhao, R. ; Chong, T.C. ; Bain, J.A. ; Schlesinger, T.E. ; Pileggi, L.T. ; Paramesh, J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This paper describes a new approach to the realization of reconfigurable CMOS-compatible RF inductors using programmable vias made from phase-change (PC) materials. Reversible reconfiguration of a custom-fabricated inductor prototype is demonstrated using voltage pulses to transform (by Joule heating) the PC switch between crystalline (ON) and amorphous (OFF) states. The RF performance shows an inductance of 1.9 (0.9) nH at 2 (5) GHz with quality factor (Q) of 12.4 (5.8) in the OFF (ON) state.
Keywords :
CMOS integrated circuits; Q-factor; inductors; phase change materials; Joule heating; OFF state; ON state; PC switch; amorphous states; crystalline states; custom-fabricated inductor prototype; frequency 2 GHz; frequency 5 GHz; phase-change materials; quality factor; reconfigurable CMOS-compatible RF inductors; reconfigurable on-chip inductor; voltage pulses;
Conference_Titel :
Electron Devices Meeting (IEDM), 2010 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4424-7418-5
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2010.5703334
