Title :
Fabrication of SWNT device by self-assembly technology
Author :
Wang, Yanyan ; Liu, Liyue ; Liu, Hai ; Wang, Ying ; Xu, Dong ; Zhang, Yafei
Author_Institution :
Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai
Abstract :
The single-walled carbon nanotubes (SWNTs) were randomly deposited on pre-treated silicon substrate by a self-assembling method. By this method, the SWNTs film with uniform distribution and random structure were formed and the density of SWNTs could be controlled by the concentration of the SWNTs suspension and the assembling time. Also, Cr interdigitated electrodes were patterned on the assembled SWNTs by traditional lift-off process. The results show that SWNTs films made by self-assembly can adhere firmly to the substrate.
Keywords :
carbon nanotubes; nanotechnology; self-assembly; assembling time; pretreated silicon substrate; random structure; self-assembling method; single-walled carbon nanotubes device; Fabrication; Nanoelectronics; Self-assembly;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585639
