DocumentCode
2369410
Title
CNTs/Cu composite thin films fabricated by electrophoresis and electroplating techniques
Author
Liu, Piang ; Wu, Jiahao ; Xu, Dong ; Pan, Yuanzhi ; You, Chang ; Zhang, Yafei
Author_Institution
Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Rao Tong Univ., Shanghai
fYear
2008
fDate
24-27 March 2008
Firstpage
975
Lastpage
978
Abstract
The CNTs (carbon nanotubes)/Cu composite thin films were fabricated by a method combined electrophoresis and electroplating techniques. Uniform composite films with CNTs content from 0 to 32.68% were prepared. Relationship between sample resistivity and CNTs content is also studied. It shows that the resistivity of composite film is even lower than that of copper. Special mechanisms of copper grain growth and the time of electroplating were investigated with different CNTs content.
Keywords
carbon nanotubes; composite materials; electrophoresis; electroplating; Cu; carbon nanotubes; copper composite thin films; copper grain growth; electrophoresis; electroplating; resistivity; Electrokinetics; Nanoelectronics; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location
Shanghai
Print_ISBN
978-1-4244-1572-4
Electronic_ISBN
978-1-4244-1573-1
Type
conf
DOI
10.1109/INEC.2008.4585648
Filename
4585648
Link To Document