Title :
CNTs/Cu composite thin films fabricated by electrophoresis and electroplating techniques
Author :
Liu, Piang ; Wu, Jiahao ; Xu, Dong ; Pan, Yuanzhi ; You, Chang ; Zhang, Yafei
Author_Institution :
Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Rao Tong Univ., Shanghai
Abstract :
The CNTs (carbon nanotubes)/Cu composite thin films were fabricated by a method combined electrophoresis and electroplating techniques. Uniform composite films with CNTs content from 0 to 32.68% were prepared. Relationship between sample resistivity and CNTs content is also studied. It shows that the resistivity of composite film is even lower than that of copper. Special mechanisms of copper grain growth and the time of electroplating were investigated with different CNTs content.
Keywords :
carbon nanotubes; composite materials; electrophoresis; electroplating; Cu; carbon nanotubes; copper composite thin films; copper grain growth; electrophoresis; electroplating; resistivity; Electrokinetics; Nanoelectronics; Transistors;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585648
