• DocumentCode
    2369410
  • Title

    CNTs/Cu composite thin films fabricated by electrophoresis and electroplating techniques

  • Author

    Liu, Piang ; Wu, Jiahao ; Xu, Dong ; Pan, Yuanzhi ; You, Chang ; Zhang, Yafei

  • Author_Institution
    Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Rao Tong Univ., Shanghai
  • fYear
    2008
  • fDate
    24-27 March 2008
  • Firstpage
    975
  • Lastpage
    978
  • Abstract
    The CNTs (carbon nanotubes)/Cu composite thin films were fabricated by a method combined electrophoresis and electroplating techniques. Uniform composite films with CNTs content from 0 to 32.68% were prepared. Relationship between sample resistivity and CNTs content is also studied. It shows that the resistivity of composite film is even lower than that of copper. Special mechanisms of copper grain growth and the time of electroplating were investigated with different CNTs content.
  • Keywords
    carbon nanotubes; composite materials; electrophoresis; electroplating; Cu; carbon nanotubes; copper composite thin films; copper grain growth; electrophoresis; electroplating; resistivity; Electrokinetics; Nanoelectronics; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-1572-4
  • Electronic_ISBN
    978-1-4244-1573-1
  • Type

    conf

  • DOI
    10.1109/INEC.2008.4585648
  • Filename
    4585648