Title :
Enhancement of high-frequency permeability of FeCoHf films by surface oxidation
Author :
Li, Shandong ; Wang, Dawei ; Li, Peiyou ; Duh, Jenq-Gong
Abstract :
Nanocrystalline FeCoHf films with crystal size about 10 nm were prepared by radio-frequency magnetron sputtering method at room temperature. The films were annealed at 400degC for 1 h in the presence of magnetic field of 2 kG. Then the films were cooled in vacuum or floating Ar/O mixed gas (referred to as AV and AO, respectively). Bright-argentine and light-brown surfaces were observed for AV and AO, respectively. The average O composition of samples AV and AO was 5.3 and 14.6 at%, respectively. Comparing with sample AV, evidently enhanced anisotropy field, resistivity and ferromagnetic resonance frequency over 3 GHz were achieved in AO. It is revealed that the surface oxidation is an effective way to increase the resonance frequency of high-frequency ferromagnetic films.
Keywords :
ferromagnetic materials; iron compounds; magnetic permeability; magnetic thin films; nanostructured materials; sputter deposition; FeCoHf; ferromagnetic resonance frequency; high-frequency ferromagnetic films; high-frequency permeability; magnetic field; nanocrystalline films; radio-frequency magnetron sputtering method; surface oxidation; Annealing; Magnetic anisotropy; Magnetic films; Oxidation; Permeability; Perpendicular magnetic anisotropy; Radio frequency; Resonant frequency; Sputtering; Temperature;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585659
