A low-power high dynamic-range sigma-delta modulator for a capacitive microphone sensor

Author

Jawed, S.A. ; Gottardi, M. ; Baschirotto, A.

Author_Institution

Microsystems Div. Fondazione Bruno, Trento

fYear

2007

fDate

2-5 July 2007

Firstpage

129

Lastpage

132

Abstract

An opamp time-multiplexed topology of a third- order SigmaDelta modulator is presented in this paper. This topology implements a third-order noise transfer-function using only two opamps by sharing one opamp between second and the third integrators of the modulator. The simulated results are comparable to a low-power modulator with three separate opamps. The proposed SigmaDelta modulator is designed for a silicon microphone front-end. In the audio-band (20-20 kHz), it features a dynamic range above 80 dB, consuming 90 muWatts with a supply voltage of 1.8 V.

Keywords

capacitive sensors; circuit noise; low-power electronics; microphones; microsensors; operational amplifiers; sigma-delta modulation; silicon; transfer functions; MEMS sensor; capacitive microphone sensor; low-power high dynamic-range sigma-delta modulator; opamp time-multiplexed topology; power 90 muW; silicon microphone front-end; third-order SigmaDelta modulator; third-order noise transfer-function; voltage 1.8 V; Acoustic sensors; Bandwidth; Capacitive sensors; Delta-sigma modulation; Energy consumption; Micromechanical devices; Microphones; Sensor phenomena and characterization; Silicon; Topology;

fLanguage

English

Publisher

ieee

Conference_Titel

Research in Microelectronics and Electronics Conference, 2007. PRIME 2007. Ph.D.

Conference_Location

Bordeaux

Print_ISBN

978-1-4244-1000-2

Electronic_ISBN

978-1-4244-1001-9

Type

conf

DOI

10.1109/RME.2007.4401828

Filename

4401828