Title :
Automatic Recognition of Defect Signatures and Notification of Tool Malfunctions - IECON´06
Author :
Toyoshima, Tetsuro ; Yamada, Eiji ; Yamamoto, Toshio ; Imai, Katsuki
Author_Institution :
Production Technol. Dev. Center, Sharp Corp., Nara
Abstract :
We have developed an automatic method that efficiently detects the defect signatures of substrates and identifies possible problems pertaining to LSI/TFT-LCD manufacturing processes and tools. This system, which has no built-in libraries, can be applied to the mass production line of thin film devices. This method is useful to quickly detect problems that have been overlooked thus far
Keywords :
pattern recognition; production engineering computing; production equipment; thin film devices; IECON´06; LSI manufacturing processes; TFT-LCD manufacturing processes; automatic recognition; defect signatures; manufacturing tools; mass production line; thin film devices; tool malfunctions notification; Humans; Inspection; Large scale integration; Libraries; Manufacturing processes; Pattern analysis; Pattern recognition; Production; Substrates; Thin film devices;
Conference_Titel :
IEEE Industrial Electronics, IECON 2006 - 32nd Annual Conference on
Conference_Location :
Paris
Print_ISBN :
1-4244-0390-1
DOI :
10.1109/IECON.2006.347929
