• DocumentCode
    2369929
  • Title

    Prospects for MEM logic switch technology

  • Author

    Liu, Tsu-Jae King ; Jeon, Jaeseok ; Nathanael, Rhesa ; Kam, Hei ; Pott, Vincent ; Alon, Elad

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
  • fYear
    2010
  • fDate
    6-8 Dec. 2010
  • Abstract
    Power density has grown to be the dominant challenge for continued IC technology scaling. This has led to renewed interest in mechanical computing for ultra-low-power applications. This paper provides an overview of recent developments in electrostatic micro-relay design and process technology, and discusses technology scaling to achieve MEM switches that are advantageous over CMOS transistors for ultra-low-power digital logic applications.
  • Keywords
    low-power electronics; microswitches; CMOS transistors; MEM logic switch technology; continued IC technology scaling; electrostatic microrelay design; mechanical computing; power density; process technology; ultra-low-power digital logic applications;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2010 IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0163-1918
  • Print_ISBN
    978-1-4424-7418-5
  • Electronic_ISBN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.2010.5703386
  • Filename
    5703386
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2369929