Title :
Prospects for MEM logic switch technology
Author :
Liu, Tsu-Jae King ; Jeon, Jaeseok ; Nathanael, Rhesa ; Kam, Hei ; Pott, Vincent ; Alon, Elad
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
Abstract :
Power density has grown to be the dominant challenge for continued IC technology scaling. This has led to renewed interest in mechanical computing for ultra-low-power applications. This paper provides an overview of recent developments in electrostatic micro-relay design and process technology, and discusses technology scaling to achieve MEM switches that are advantageous over CMOS transistors for ultra-low-power digital logic applications.
Keywords :
low-power electronics; microswitches; CMOS transistors; MEM logic switch technology; continued IC technology scaling; electrostatic microrelay design; mechanical computing; power density; process technology; ultra-low-power digital logic applications;
Conference_Titel :
Electron Devices Meeting (IEDM), 2010 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4424-7418-5
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2010.5703386
