Evidence and solution of over-RESET problem for HfOX based resistive memory with sub-ns switching speed and high endurance

The memory performances of the HfO_X based bipolar resistive memory, including switching speed and memory reliability, are greatly improved in this work. Record high switching speed down to 300 ps is achieved. The cycling test shed a clear light on the wearing behavior of resistance states, and the correlation between over-RESET phenomenon and the worn low resistance state in the devices is discussed. The modified bottom electrode is proposed for the memory device to maintain the memory window and to endure resistive switching up to 10¹⁰ cycles.