Title : 
A quasi-matrix ferroelectric memory for future silicon storage
         
        
            Author : 
Nishihara, T. ; Ito, Y.
         
        
            Author_Institution : 
Sony Corporation
         
        
        
        
        
        
        
            Keywords : 
Capacitors; Costs; Degradation; Ferroelectric films; Ferroelectric materials; MOS devices; Nonvolatile memory; Random access memory; Silicon; Voltage;
         
        
        
        
            Conference_Titel : 
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
         
        
            Conference_Location : 
San Francisco, CA, USA
         
        
            Print_ISBN : 
0-7803-7335-9
         
        
        
            DOI : 
10.1109/ISSCC.2002.992174