Title :
Reconfigurable Lens-Array with Monolithically Integrated MEMS Switches
Author :
Cheng, Chih-Chieh ; Abbaspour-Tamijani, Abbas ; Lakshminarayanan, Balaji
Author_Institution :
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ
Abstract :
This paper presents a Ka-band monolithic MEMS-enabled lens-array. Two-bit antenna-filter-antenna (AFA) elements with programmable 3-pole/4-pole frequency response are used to synthesize a reconfigurable phase-transforming aperture. A fully integrated device comprising 484 AFA elements and 2420 switches is fabricated on a stack of two 4"quartz wafers with the SU-8 adhesive bonding. The array is biased to various modes by applying 0 or 100 V to 264 bias lines. AFA elements have an average insertion loss of 4.3-9.4 dB and phase error of less than 17deg at 34.8 GHz. Pattern measurements at 34.8 GHz show a scan width of 60deg in the E-plane and H-plane. E-plane pattern is presented.
Keywords :
adhesive bonding; antenna radiation patterns; aperture antennas; frequency response; lens antennas; microfabrication; microswitches; millimetre wave antenna arrays; millimetre wave filters; wafer bonding; E-plane pattern measurement; H-plane pattern measurement; Ka-band monolithic integrated MEMS switches; SU-8 adhesive bonding; frequency 34.8 GHz; insertion loss; loss 4.3 dB to 9.4 dB; phase error; programmable 3-pole frequency response; programmable 4-pole frequency response; quartz wafers; reconfigurable lens-array; reconfigurable phase-transforming aperture; switch fabrication; two-bit antenna-filter-antenna; voltage 0 V to 100 V; Band pass filters; Feeds; Frequency response; Microswitches; Polarization; Resonator filters; Slot antennas; Stripline; Switches; Wafer bonding;
Conference_Titel :
Microwave Conference, 2008. EuMC 2008. 38th European
Conference_Location :
Amsterdam
Print_ISBN :
978-2-87487-006-4
DOI :
10.1109/EUMC.2008.4751400
