Optical Multichannel Imaging of Pulsed Laser Deposition of ZnO

Author

Jones, John G. ; Lirong Sun ; Murphy, Niall R. ; Jakubiak, Rachel

Author_Institution

Mater. & Manuf. Directorate, Air Force Res. Lab., Wright-Patterson AFB, OH, USA

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2590

Lastpage

2591

Abstract

Pulsed laser deposition is an efficient technique to obtain stoichiometric material transfer from target to substrate and has been used by researchers and in industry for depositing materials for use in applications ranging from hard coatings and superconductors to optical materials. The images detailed here will demonstrate the unique plume evolution that occurs and the high-speed ionic species, and slow-speed neutral and molecular species that travel from target material to substrate.

Keywords

II-VI semiconductors; optical images; pulsed laser deposition; semiconductor growth; semiconductor thin films; stoichiometry; wide band gap semiconductors; zinc compounds; ZnO; hard coatings; high-speed ionic species; molecular species; optical materials; optical multichannel imaging; plume evolution; pulsed laser deposition; slow-speed neutral species; stoichiometric material transfer; superconductors; High-speed optical techniques; Optical imaging; Optical pulses; Pulsed laser deposition; Substrates; Zinc oxide; Imaging; Zinc Oxide; materials preparation;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2342159

Filename

6876176