Hybrid Integrated RF-MEMS Phased Array Antenna at 10GHz

In this paper, a one-dimensional electrically steerable RF-MEMS phased array antenna for operation at 9.5 GHz is demonstrated. The antenna itself is a four by eight patch antenna array realised on low-loss Teflon substrate and the feed network made out of the same substrate is a one-to-four corporate feed network. The phase shifting necessary to steer the main beam of the antenna in the H-plane of the aperture is achieved by four 3 bit RF-MEMS phase shifters, which are integrated in a hybrid fashion between the antenna and the feed network. The paper describes the integration of the different elements in a standalone phased array antenna demonstrator. The design of the 3 bit RF-MEMS phase shifters is presented and validated by very good measurement results. Finally, the measured radiation characteristic of the complete phased array antenna is shown for different switching states of the phase shifters.