Title :
Statistical characterization of trap position, energy, amplitude and time constants by RTN measurement of multiple individual traps
Author :
Nagumo, Toshiharu ; Takeuchi, Kiyoshi ; Hase, Takashi ; Hayashi, Yoshihiro
Author_Institution :
LSI Res. Lab., Renesas Electron. Corp., Sagamihara, Japan
Abstract :
Distributions of trap position, energy, amplitude, time constants of random telegraph noise and their correlation are examined by characterizing multiple individual traps. The traps detected were not uniformly distributed in the energy space. Contrary to the elastic tunneling model, there was no correlation between the time constants and depth-wise position.
Keywords :
elasticity; electric noise measurement; semiconductor device measurement; semiconductor device noise; statistical distributions; tunnelling; amplitude distribution; energy distribution; random telegraph noise measurement; time constant distribution; trap detection; trap position distribution;
Conference_Titel :
Electron Devices Meeting (IEDM), 2010 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4424-7418-5
Electronic_ISBN :
0163-1918
DOI :
10.1109/IEDM.2010.5703437