Title :
To verify manufacturing yield by testing
Author :
Wang, Mill-Jer ; Chen, Jwu-E ; Chen, Yung-Yuan
Author_Institution :
Chung-Hua Polytech. Inst., Hsinchu, Taiwan
Abstract :
The effect of test errors should be cancelled while before test yield is used to analyze the manufacturing yield. Test errors can be alleviated from engineering run and production run stages. One of the more difficult aspect of yield modeling is the fact that defect density is generally not constant with time. In this paper, we study the flow of defect monitor used in production test. Based on the yield data obtained from engineering stage, the upper and lower bounds of chip yield are calculated after determining the variance of defect density and clustering parameter. The yield bound/distribution is used to diagnose the results after wafer sort while in production. One ASIC product is used to validate this yield analysis procedure. This work can assist the ASIC design center to determine a manufacturing laboratory beginning the design and to control the chip area in the period of circuit design
Keywords :
CMOS integrated circuits; application specific integrated circuits; integrated circuit yield; large scale integration; production testing; ASIC design center; ASIC product; CMOS chip; circuit design; clustering paramete; defect density; engineering run; manufacturing yield; production run; production test; test errors; yield analysis; yield bound/distribution; yield data; Fitting; Foundries; Manufacturing processes; Monitoring; Predictive models; Probes; Production; Semiconductor device modeling; Testing; Yield estimation;
Conference_Titel :
Test Symposium, 1994., Proceedings of the Third Asian
Conference_Location :
Nara
Print_ISBN :
0-8186-6690-0
DOI :
10.1109/ATS.1994.367201