DocumentCode :
2372050
Title :
Micromachined e-jet for IC chip cooling
Author :
Tsung-Kuan A.Chou ; Najafi, K. ; Muller, M.O. ; Bernal, L.P. ; Washabaugh, P.D. ; Parviz, B.A.
Author_Institution :
Center for Wireless Integrated MicroSystems
Volume :
2
fYear :
2002
fDate :
7-7 Feb. 2002
Firstpage :
286
Lastpage :
508
Keywords :
Acoustic arrays; Acoustic devices; Acoustic measurements; Acoustical engineering; Cooling; Design engineering; Electrostatic measurements; Prototypes; Resonance; Velocity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7335-9
Type :
conf
DOI :
10.1109/ISSCC.2002.992257
Filename :
992257
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2372050
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