• DocumentCode
    2372050
  • Title

    Micromachined e-jet for IC chip cooling

  • Author

    Tsung-Kuan A.Chou ; Najafi, K. ; Muller, M.O. ; Bernal, L.P. ; Washabaugh, P.D. ; Parviz, B.A.

  • Author_Institution
    Center for Wireless Integrated MicroSystems
  • Volume
    2
  • fYear
    2002
  • fDate
    7-7 Feb. 2002
  • Firstpage
    286
  • Lastpage
    508
  • Keywords
    Acoustic arrays; Acoustic devices; Acoustic measurements; Acoustical engineering; Cooling; Design engineering; Electrostatic measurements; Prototypes; Resonance; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • Print_ISBN
    0-7803-7335-9
  • Type

    conf

  • DOI
    10.1109/ISSCC.2002.992257
  • Filename
    992257
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2372050