CMOS biosensor platform

Author

Widdershoven, F. ; Van Steenwinckel, D. ; Überfeld, J. ; Merelle, T. ; Suy, H. ; Jedema, F. ; Hoofman, R. ; Tak, C. ; Sedzin, A. ; Cobelens, B. ; Sterckx, E. ; van der Werf, R. ; Verheyden, K. ; Kengen, M. ; Swartjes, F. ; Frederix, F.

Author_Institution

NXP Semicond., Leuven, Belgium

fYear

2010

fDate

6-8 Dec. 2010

Abstract

The detection principle, process integration and system architecture of a novel 90-nm CMOS-based mixed-signal capacitive biosensor with 256 × 256 densely packed nano-electrodes are presented. The sensor operates at modulation frequencies up to 200 MHz, and has on-chip temperature sensors, A/D converters and digital I/O. Brownian motion of nanobeads over the sensor surface has been recorded in real time. The biosensor principle has been validated with a biological test assay. The sensor provides a versatile platform for a multitude of novel multiplexed biosensing applications with enhanced performance by digital control and statistical data analysis.

Keywords

Brownian motion; CMOS integrated circuits; analogue-digital conversion; bioMEMS; biosensors; capacitive sensors; data analysis; electrodes; signal processing; statistical analysis; A/D converters; CMOS based mixed signal capacitive biosensor; CMOS biosensor platform; biological test assay; biosensor nanoelectrodes; biosensor principle; detection principle; digital I/O; digital control; modulation frequency; nanobead Brownian motion; on chip temperature sensors; process integration; statistical data analysis; system architecture;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting (IEDM), 2010 IEEE International

Conference_Location

San Francisco, CA

ISSN

0163-1918

Print_ISBN

978-1-4424-7418-5

Electronic_ISBN

0163-1918

Type

conf

DOI

10.1109/IEDM.2010.5703484

Filename

5703484