DocumentCode

2372624

Title

Single-chip surface-micromachined integrated gyroscope with 50/spl deg//hour root allan variance

Author

Geen, J.A. ; Sherman, S.J. ; Chang, J.F. ; Lewis, S.R.

Author_Institution

Analog Devices Inc.

Volume

2

fYear

2002

fDate

7-7 Feb. 2002

Firstpage

346

Lastpage

539

Keywords

Costs; Electrostatic actuators; FETs; Gyroscopes; Low-frequency noise; Packaging; Pulse amplifiers; Resistors; Switches; White noise;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-7335-9

Type

conf

DOI

10.1109/ISSCC.2002.992288

Filename

992288