Title :
A gas detection system on a single CMOS chip compromising capactive, calorimetric, and mass-sensitive microsensors
Author :
Hagleitner, C. ; Lange, D. ; Kerness, N. ; Hierlemann, A. ; Brand, O. ; Baltes, H.
Author_Institution :
Physical Electronics Laboratory, ETH Zurich
Keywords :
Capacitive sensors; Capacitors; Finite impulse response filter; Gas detectors; Power amplifiers; Power measurement; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7335-9
DOI :
10.1109/ISSCC.2002.992290
