Automated optical inspection method for MEMS fabrication

Author

Yang, M. ; Castellani, M. ; Landot, R. ; Beyeler, F. ; Wang, Z. ; Pham, D.T.

Author_Institution

Manuf. Eng. Centre, Cardiff Univ., Cardiff, UK

fYear

2010

fDate

4-7 Aug. 2010

Firstpage

1923

Lastpage

1931

Abstract

This paper presents a new optic inspection method for detection of defects in the layer of Micro Electro Mechanical Systems (MEMS) after the bonding process. In testing MEMS, a piezo driven vibrator is used to vibrate the MEMS device at its natural resonance frequency in vacuum environment. The amplitude of the vibrated movement of the device is visually recorded and frame of the video is processed by the developed image processing algorithm. When excited by resonant frequency generator, the variance of deflection of the tested device can be the indicator of defectiveness of the MEMS.

Keywords

automatic optical inspection; bonding processes; micromechanical devices; MEMS fabrication; automated optical inspection; bonding process; defect detection; image processing; microelectro mechanical system; piezo driven vibrator; resonance frequency generator; vacuum environment; Grippers; Inspection; Micromechanical devices; Pixel; Resonant frequency; Ultrafast optics; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation (ICMA), 2010 International Conference on

Conference_Location

Xi´an

ISSN

2152-7431

Print_ISBN

978-1-4244-5140-1

Electronic_ISBN

2152-7431

Type

conf

DOI

10.1109/ICMA.2010.5589223

Filename

5589223