Title :
Automated optical inspection method for MEMS fabrication
Author :
Yang, M. ; Castellani, M. ; Landot, R. ; Beyeler, F. ; Wang, Z. ; Pham, D.T.
Author_Institution :
Manuf. Eng. Centre, Cardiff Univ., Cardiff, UK
Abstract :
This paper presents a new optic inspection method for detection of defects in the layer of Micro Electro Mechanical Systems (MEMS) after the bonding process. In testing MEMS, a piezo driven vibrator is used to vibrate the MEMS device at its natural resonance frequency in vacuum environment. The amplitude of the vibrated movement of the device is visually recorded and frame of the video is processed by the developed image processing algorithm. When excited by resonant frequency generator, the variance of deflection of the tested device can be the indicator of defectiveness of the MEMS.
Keywords :
automatic optical inspection; bonding processes; micromechanical devices; MEMS fabrication; automated optical inspection; bonding process; defect detection; image processing; microelectro mechanical system; piezo driven vibrator; resonance frequency generator; vacuum environment; Grippers; Inspection; Micromechanical devices; Pixel; Resonant frequency; Ultrafast optics; Vibrations;
Conference_Titel :
Mechatronics and Automation (ICMA), 2010 International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4244-5140-1
Electronic_ISBN :
2152-7431
DOI :
10.1109/ICMA.2010.5589223
