Title :
Session II Microelectronics, micromechanics and technology of measurements
Abstract :
Start of the above-titled section of the conference proceedings record.
Conference_Titel :
Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
Conference_Location :
Novosibirsk
Print_ISBN :
978-5-7782-0893-3
DOI :
10.1109/SIBEDM.2008.4585853
