Title :
Research of surface modification on frequency properties of microresonators
Author :
Gaidukov, Gennadiy ; Pagin, Pavel
Author_Institution :
Moscow Inst. of Electron. Eng. (Tech. Univ.), Moscow
Abstract :
In the article the influence of adsorbed layer on elastic constants and surface stress are considered in MEMS and NEMS. The calculated results are shown on example of silicon resonator. Comparison between theoretical and calculated results is shown.
Keywords :
adsorbed layers; elastic constants; elemental semiconductors; micromechanical resonators; silicon; MEMS; NEMS; Si; adsorbed layer silicon resonator; elastic constants; frequency properties; microresonators; surface modification; surface stress; Equations; Joining processes; Microcavities; Micromechanical devices; Nanoelectromechanical systems; Resonance; Resonant frequency; Silicon; Stress; Structural beams; MEMS; frequency properties; resonance;
Conference_Titel :
Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
Conference_Location :
Novosibirsk
Print_ISBN :
978-5-7782-0893-3
DOI :
10.1109/SIBEDM.2008.4585856
