Title :
Bi-directional Gap Closing MEMS Actuator Using Timing and Control Techniques
Author :
Rogers, John E. ; Ozmun, Phillip M. ; Hung, John Y. ; Dean, Robert N.
Author_Institution :
Dept. of Electr. & Comput. Eng., Auburn Univ., AL
Abstract :
We analyze a micro-electro mechanical system (MEMS) device known as a gap closing actuator (GCA) and propose two timing and control algorithms that enable bi-directional motion control. The electrostatic and mechanical force equations are defined and a model created that simulates a GCA. Two timing and control techniques are used to enable bi-directional operation without using additional mechanical or electrical actuators, but with feedback control
Keywords :
electrostatic actuators; feedback; motion control; MEMS actuator; bi-directional gap closing actuator; bi-directional motion control; control techniques; electrostatics; feedback control; mechanical force equations; micro-electro mechanical system; timing techniques; Actuators; Algorithm design and analysis; Bidirectional control; Control systems; Electrostatics; Equations; Mechanical systems; Micromechanical devices; Motion control; Timing;
Conference_Titel :
IEEE Industrial Electronics, IECON 2006 - 32nd Annual Conference on
Conference_Location :
Paris
Print_ISBN :
1-4244-0390-1
DOI :
10.1109/IECON.2006.347738
