Bi-directional Gap Closing MEMS Actuator Using Timing and Control Techniques

Author

Rogers, John E. ; Ozmun, Phillip M. ; Hung, John Y. ; Dean, Robert N.

Author_Institution

Dept. of Electr. & Comput. Eng., Auburn Univ., AL

fYear

2006

fDate

6-10 Nov. 2006

Firstpage

3149

Lastpage

3154

Abstract

We analyze a micro-electro mechanical system (MEMS) device known as a gap closing actuator (GCA) and propose two timing and control algorithms that enable bi-directional motion control. The electrostatic and mechanical force equations are defined and a model created that simulates a GCA. Two timing and control techniques are used to enable bi-directional operation without using additional mechanical or electrical actuators, but with feedback control

Keywords

electrostatic actuators; feedback; motion control; MEMS actuator; bi-directional gap closing actuator; bi-directional motion control; control techniques; electrostatics; feedback control; mechanical force equations; micro-electro mechanical system; timing techniques; Actuators; Algorithm design and analysis; Bidirectional control; Control systems; Electrostatics; Equations; Mechanical systems; Micromechanical devices; Motion control; Timing;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE Industrial Electronics, IECON 2006 - 32nd Annual Conference on

Conference_Location

Paris

ISSN

1553-572X

Print_ISBN

1-4244-0390-1

Type

conf

DOI

10.1109/IECON.2006.347738

Filename

4153467

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2373349