Title :
Microelectronic transducer for heat-power engineering
Author :
Lobach, Roman V. ; Lobach, Oleg V. ; Dikareva, Regina P.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk
Abstract :
In this paper is described of microsystem heat flux sensor principle of operation, is shown sensor construction and is presented its main parameters.
Keywords :
microsensors; transducers; heat-power engineering; microelectronic transducer; microsensors; microsystem heat flux sensor; Battery charge measurement; Heat engines; Microelectronics; Power engineering; Resistors; Temperature sensors; Thermal force; Thermal resistance; Thermal sensors; Transducers; MEMS; heat flux sensor; microsystem technology; polysilicon;
Conference_Titel :
Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
Conference_Location :
Novosibirsk
Print_ISBN :
978-5-7782-0893-3
DOI :
10.1109/SIBEDM.2008.4585871
