Title :
Investigation of generation process in narrowband MIS structures
Author :
Nastovjak, Artem E. ; Polovinkin, Vladimir G.
Author_Institution :
Inst. of Semicond. Phys. SB RAS, Novosibirsk
Abstract :
in the paper method of automatic measurements of non-equilibrium depletion relaxation in MIS structures was offered. Simple relaxation process model based on assumption of infinite capacitance of inversion layer was proposed.
Keywords :
MIS structures; automatic measurements; infinite capacitance; inversion layer; narrowband MIS structures; nonequilibrium depletion relaxation; relaxation process model; Narrowband; CID; IR FPA; MIS; Non-equilibrium depletion; relaxation;
Conference_Titel :
Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
Conference_Location :
Novosibirsk
Print_ISBN :
978-5-7782-0893-3
DOI :
10.1109/SIBEDM.2008.4585872
