Title :
Non-Destructive Broad-Band Characterization Method of Thin Ferroelectric Layers at Microwave Frequencies
Author :
Blasi, Serge De ; Quéfféléc, Patrick
Author_Institution :
Lab.-STICC, Telecom Bretagne, Brest
Abstract :
A non-destructive broad-band method using a rectangular waveguide cell to characterize ferroelectric materials is proposed in this article. The cell scattering parameters (S-parameters) are calculated from an electromagnetic analysis based on the application of the mode matching technique. The sensitivity of this method proved to be sufficient to allow characterization of submicronic ferroelectric layers.
Keywords :
S-parameters; electromagnetic wave scattering; ferroelectric materials; mode matching; rectangular waveguides; waveguide theory; S-parameters; cell scattering parameters; electromagnetic analysis; microwave frequencies; mode matching technique; nondestructive broadband characterization method; rectangular waveguide cell; submicronic ferroelectric layers; thin ferroelectric layers; Coplanar transmission lines; Dielectric losses; Dielectric measurements; Dielectric substrates; Ferroelectric materials; Metallization; Microwave frequencies; Permittivity measurement; Propagation losses; Transmission line measurements;
Conference_Titel :
Microwave Conference, 2008. EuMC 2008. 38th European
Conference_Location :
Amsterdam
Print_ISBN :
978-2-87487-006-4
DOI :
10.1109/EUMC.2008.4751572
