Permeameter For The Characterization Of Magnetic Thin Films Up To 15 GHz

This paper presents a new permeameter for measurement of the complex permeability mu of magnetic thin films up to 15 GHz. The permeameter consists of a strip conductor, which acts as an inductor and is loaded with the magnetic material. The geometry is optimized with respect to sensitivity and self resonance by field simulations using HFSS. A new wideband calibration procedure up to the self resonance frequency of the fixture is also outlined. It utilizes a reference material with known permeability, where the ferromagnetic resonance is shifted by an external magnetic DC field. Frequency dependent calibration factors are introduced. Small residual errors at low frequencies are removed through vibrating sample magnetometer measurements.