Title :
Controlled dissolution applied to berlinite and quartz materials
Author :
Deleuze, M. ; Cambon, O. ; Goiffon, A. ; Ibanez, A. ; Philippot, E.
Author_Institution :
Lab. de Physiochimie des Materiaux Solides, CNRS, Montpellier, France
Abstract :
Conditions of good controlled dissolution of berlinite and quartz have been found for two different plate orientations: AT and SC cuts. Chemical lapping of berlinite AT-cuts has been developed in acid media, and that of AT- and SC-cuts has been developed in basic solvents. Conditions have been specified for both materials which result in a good surface state and a thickness defined by the required frequency. Piezoelectric characteristics of resonators made from controlled dissolution and from ionic beam etching are compared
Keywords :
aluminium compounds; crystal growth from solution; crystal resonators; dissolving; piezoelectric materials; quartz; sputter etching; surface topography; AT-cut crystal; AlPO4; SC-cut crystal; SiO2; berlinite; chemical lapping; controlled dissolution; ionic beam etching; piezoelectric resonators; quartz; surface state; Chemicals; Crystallization; Etching; Ion beams; Lapping; Resonant frequency; Rough surfaces; Surface roughness; Surface texture; Thermodynamics;
Conference_Titel :
Frequency Control Symposium, 1993. 47th., Proceedings of the 1993 IEEE International
Conference_Location :
Salt Lake City, UT
Print_ISBN :
0-7803-0905-7
DOI :
10.1109/FREQ.1993.367420
