DocumentCode
2374171
Title
Defects in surface layers of lapped crystal plates and their influence on Q-factors of crystal units
Author
Moshkovsky, A.S.
Author_Institution
Sci. Res. Inst. "Fonon", Moscow, Russia
fYear
1993
fDate
2-4 Jun 1993
Firstpage
407
Lastpage
415
Abstract
Investigations on crystal elements of AT-cut at 1 Mc vibrating at the main resonance were performed. Using the value of the etching velocity change for lapped crystal elements, the total value of the quartz layer containing defects in the crystal lattice is defined. Two components of this layer are identified. The disposition of these components on the lapped quartz surface is defined, and the contribution of each of the components to the loss value in vibrating crystal elements is computed
Keywords
Q-factor; crystal resonators; etching; quartz; surface topography; AT-cut crystal; Q-factors; SiO2; crystal lattice; etching velocity; grain size; lapped crystal plates; lapped quartz surface; main resonance; surface layer defect; vibrating crystal elements; Abrasives; Crystallization; Etching; Frequency; Lapping; Lattices; Powders; Q factor; Resonance; Surface cracks;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 1993. 47th., Proceedings of the 1993 IEEE International
Conference_Location
Salt Lake City, UT
Print_ISBN
0-7803-0905-7
Type
conf
DOI
10.1109/FREQ.1993.367426
Filename
367426
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