Broadband Dielectric Material Characterization: A Comparison of On-Wafer and Split-Cylinder Resonator Measurements

We examine a broadband method to extract the relative permittivity and loss tangent of low-loss dielectric substrates from on-wafer scattering-parameter measurements of coplanar waveguides of differing lengths. To validate this method, we compare with measurements performed using two different split-cylinder resonators and demonstrate agreement over a broad frequency range.