Title :
Deformation-sensitive cuts for surface acoustic waves in α-quartz
Author :
Taziev, R.M. ; Kolosovsky, E.A. ; Kozlov, A.S.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia
Abstract :
The influence of external static forces on SAW (surface acoustic wave) velocity is computed for circular plates (membranes). The pressure sensitivity of the SAW velocity as a function of α-quartz crystal anisotropy is studied by sensitivity contour mapping from two independent variables: direction of SAW propagation and cut angles of α-quartz. Theoretical sensitivity values are compared with experimental ones for circular (membrane) plates, and good agreement is found
Keywords :
acoustic wave propagation; acoustic wave velocity; quartz; surface acoustic wave resonators; surface acoustic waves; α-quartz crystal anisotropy; SAW propagation; SAW resonator; SAW velocity; SiO2; circular plates; cut angles; deformation sensitive cuts; external static forces; membranes; pressure sensitivity; sensitivity contour mapping; surface acoustic waves; Acoustic waves; Anisotropic magnetoresistance; Biomembranes; Equations; Solids; Stress; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Temperature sensors;
Conference_Titel :
Frequency Control Symposium, 1993. 47th., Proceedings of the 1993 IEEE International
Conference_Location :
Salt Lake City, UT
Print_ISBN :
0-7803-0905-7
DOI :
10.1109/FREQ.1993.367459
