Title :
Precision SAW pressure sensors
Author :
Vlassov, Yu.N. ; Kozlov, A.S. ; Pashchin, N.S. ; Yakovkin, I.B.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia
Abstract :
The design and performance of two types of SAW (surface acoustic wave) pressure sensors are considered. SAW resonator oscillators with metal strip gratings designed for operation at 200 and 360 MHz have been used in both types of devices. The sensitivity and the nonlinearity of both sensors, a sensor with a sensitive element shaped as an integral crystal diaphragm and a sensor with mechanically loaded quartz plates, are measured. Recommendations are made on the optimal configuration of the SAW pressure sensor according to pressure and dynamic range requirements
Keywords :
VHF oscillators; pressure sensors; surface acoustic wave oscillators; surface acoustic wave resonators; surface acoustic wave sensors; 200 MHz; 360 MHz; SAW pressure sensor; SAW resonator oscillators; integral crystal diaphragm; mechanically loaded quartz plates; metal strip gratings; surface acoustic wave pressure sensor design; Acoustic sensors; Acoustic waves; Dynamic range; Gratings; Mechanical variables measurement; Oscillators; Shape measurement; Strips; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium, 1993. 47th., Proceedings of the 1993 IEEE International
Conference_Location :
Salt Lake City, UT
Print_ISBN :
0-7803-0905-7
DOI :
10.1109/FREQ.1993.367460
