Title :
Extraction and transport of the high current ion beam
Author :
Chung, K.H. ; Choi, B.H. ; Kim, W. ; Ko, S.K.
Author_Institution :
Seoul Nat. Univ., South Korea
Abstract :
The design and construction of the ion-beam extraction and transport system of a high-current ion implanter for industrial applications are described. A duoPIGatron ion source with a multibeamlet has provided a nitrogen ion current of about 100 mA. The duoPIGatron ion source is modified to improve the extractable ion current and beam quality using space-charge compensation in the beam extraction region by an electron beam. In addition, electrostatic suppression in the acceleration tube and space-charge neutralization in the axial field free region were studied in connection with preventing beam divergence due to the space-charge effect in the high-current beam line
Keywords :
beam handling equipment; beam handling techniques; ion sources; acceleration tube; axial field free region; beam divergence; duoPIGatron ion source; electron beam; electrostatic suppression; extractable ion current; high current ion beam; high-current beam line; high-current ion implanter; ion-beam extraction; multibeamlet; space-charge compensation; space-charge effect; space-charge neutralization; Accelerator magnets; Control systems; Electron beams; Electron tubes; Ion accelerators; Ion beams; Ion sources; Particle beams; Plasma confinement; Plasma density;
Conference_Titel :
Particle Accelerator Conference, 1989. Accelerator Science and Technology., Proceedings of the 1989 IEEE
Conference_Location :
Chicago, IL
DOI :
10.1109/PAC.1989.73223
