A PDMS Mold with Embedded Sensory Array for Micromolding Processes

In this paper, we proposed a monitoring method based on embedded sensory array in micromolding mold to monitor micromolding processes. The sensory array includes a resistive thermal flow sensor and a lot of temperature sensors. We design a set of micromachined processes to embed the sensory array in micromolding mold. During micromolding process, the embedded sensory array measures the fluid volume calculated with flow velocity, and shows the temperature distribution of micromolding mold. A feedback control system which be fed with the data measured by embedded sensory array was designed to monitor micromolding processes. This paper describes embedded sensory array design, mathematical simulation, processing sequence, and implementation