DocumentCode

2375794

Title

CAD/CAE in Semiconductor Fabrication: An Integrated Approach

Author

Arora, Vijay K. ; Samudra, Ganesh

Author_Institution

National University of Singapore

fYear

1992

fDate

11-14 Nov 1992

Firstpage

726

Lastpage

731

Keywords

Computer aided engineering; Fabrication;

fLanguage

English

Publisher

ieee

Conference_Titel

Frontiers in Education, 1992. Proceedings. Twenty-Second Annual conference

Print_ISBN

0-7803-0832-8

Type

conf

DOI

10.1109/FIE.1992.683496

Filename

683496